Design of an absolute distance interferometer for the dynamic calibration of large-volume coordinate measurement machines
Design,Dynamic,Interferometry,Metrology
Insulation of heat sources by additively manufactured parts
Conceptual design,Temperature,Thermal error
Measurement errors in the Planck-Balance caused by alternating forces
Accuracy,Deformation,Force,Uncertainty
Measurement platform with a multi-functional MEMS-SPM head for high-throughput characterisation of nanostructured materials
Dimensional,Nano indentation,Scanning probe microscope (SPM),Speed
Semi-deterministic Manufacturing Process for Roughness Standards for Involute Gears
Development,Grinding,Roughness,Ultra-precision
Progress in nanometrology: reduction of measurement uncertainty of step height and etching depth calibration down to 0.3 nm
Accuracy,Atomic force microscopy (AFM),Metrology,Nano technology
Development of a large tube outdoor measuring facility for solar modules
Computer aided design (CAD),Development,Measuring instrument
Design and manufacture of a reference interferometer for long-range distance metrology
Computer aided design (CAD),Interferometry,Measuring instrument,Metrology
Design and manufacturing of deterministically micro-structured plates for capacitive sensors
Design,Microstructure,Sensor,Ultra-precision
Distortion characterization of a metrological UV- microscope for uni- and bidirectional measurements
Dimensional,Microscope,Microstructure,Modelling