Measurement and Evaluation Processes for Inner Micro Structures euspen2018-04-04T13:59:24+00:00 Read More
Traceable profilometer with a piezoresistive cantilever for high-aspect-ratio microstructure metrology euspen2018-04-04T13:59:26+00:00 Read More
Thermal expansion and long term stability of ceramics NEXCERA studied by absolute length measurements using multiple wavelengths imaging interferometry euspen2018-04-04T14:04:55+00:00 Read More
Flatness Measurements with the Deflectometric Flatness Reference at PTB euspen2018-04-04T14:06:36+00:00 Read More
Traceable characterisation of high-precision moving stages with displacement resolutions down to 10 pm euspen2018-04-04T14:07:41+00:00 Read More
Reference areal surface metrology by high speed metrological large range AFM euspen2018-04-04T14:07:52+00:00 Read More
A fully-fibre coupled interferometer system for displacement and angle metrology euspen2018-04-04T14:08:11+00:00 Read More
