Physikalisch-Technische Bundesanstalt

|Physikalisch-Technische Bundesanstalt

Progress in nanometrology: reduction of measurement uncertainty of step height and etching depth calibration down to 0.3 nm

Accuracy,Atomic force microscopy (AFM),Metrology,Nano technology

Development of a large tube outdoor measuring facility for solar modules

Computer aided design (CAD),Development,Measuring instrument

Design and manufacture of a reference interferometer for long-range distance metrology

Computer aided design (CAD),Interferometry,Measuring instrument,Metrology

Design and manufacturing of deterministically micro-structured plates for capacitive sensors


Distortion characterization of a metrological UV- microscope for uni- and bidirectional measurements


Analysis of vibration-based degradation of the spatial resolution of a nanometer-X-ray fluorescence analysis setup

Analysis,Finite element method (FEM),Metrology,Vibration

A compact and calibratable von Hamos X-Ray Spectrometer based on two full-cylinder HAPG mosaic crystals for high energy-resolution XES and RIXS

Analysis,Measuring instrument,Metrology,X-ray

A phase retrieval inspired approach for the determination of optical aberrations in microscopy


Design and manufacturing of large range, discrete step chirp standards


Improved measurement electronics for temperature measurement and control

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