Progress in nanometrology: reduction of measurement uncertainty of step height and etching depth calibration down to 0.3 nm
Accuracy,Atomic force microscopy (AFM),Metrology,Nano technology
Development of a large tube outdoor measuring facility for solar modules
Computer aided design (CAD),Development,Measuring instrument
Design and manufacture of a reference interferometer for long-range distance metrology
Computer aided design (CAD),Interferometry,Measuring instrument,Metrology
Design and manufacturing of deterministically micro-structured plates for capacitive sensors
Design,Microstructure,Sensor,Ultra-precision
Distortion characterization of a metrological UV- microscope for uni- and bidirectional measurements
Dimensional,Microscope,Microstructure,Modelling
Analysis of vibration-based degradation of the spatial resolution of a nanometer-X-ray fluorescence analysis setup
Analysis,Finite element method (FEM),Metrology,Vibration
A compact and calibratable von Hamos X-Ray Spectrometer based on two full-cylinder HAPG mosaic crystals for high energy-resolution XES and RIXS
Analysis,Measuring instrument,Metrology,X-ray
A phase retrieval inspired approach for the determination of optical aberrations in microscopy
Analysis,Dimensional,Metrology,Microscope
Design and manufacturing of large range, discrete step chirp standards
Design,Measurement,Turning,Ultra-precision