Ultra Precision Machines and Control

|Ultra Precision Machines and Control

Development of a Vertical-spindle Rotary Surface Grinding Machine for Large Scale Silicon-wafers–Machine Specifications and Performance of Rotary Work Table

Parameter Determination for an Electromechanical Model of a Displacement-Amplified Piezoelectric Actuator

Ultraprecise positioning mechanism with 3-DOF over a one-millimeter stroke using monolithic flexure guide and electromagnetic actuator

Ultra Precision Process Monitoring

Investigations of a small Machine Tool with CFRP-frame

A New Approach on Reducing Thermal Impacts on High Precision Machine Tools

Feasibility study on a spindle supported by high stiffness water hydrostatic bearings for ultra-precision machine tool

The dynamic design of an ultra-precision machine tool used for larger KDP crystal machining

Investigation of micro-optic polishing characteristics by vibration-assisted polishing

Long Range Precision Stage Using Multi Bar Mirrors

Translate »