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Ultra Precision Machines and Control
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Ultra Precision Machines and Control
Development of a Vertical-spindle Rotary Surface Grinding Machine for Large Scale Silicon-wafers–Machine Specifications and Performance of Rotary Work Table
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euspen
2018-04-04T13:59:17+00:00
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A Parallelism Alignment Mechanism for Nanoimprint Lithograph with Large Imprinting Force
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euspen
2018-04-04T13:59:22+00:00
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Design and optimization of a 3-DOF planar MEMS Stage with integrated thermal position sensors
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euspen
2018-04-04T13:59:11+00:00
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Parameter Determination for an Electromechanical Model of a Displacement-Amplified Piezoelectric Actuator
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euspen
2018-04-04T13:59:17+00:00
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Compact Translatory Actuator with Moving Magnets and Flexure Guide for Versatile Applications
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euspen
2018-04-04T13:59:08+00:00
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Concept for a Miniaturized Machine-Tool-Module for the Manufacturing of Micro-Components Operated at its Resonance Frequency
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euspen
2018-04-04T13:59:32+00:00
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Self-tuning dynamic vibration absorber for machine tool chatter suppression
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euspen
2018-04-04T13:59:12+00:00
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Ultraprecise positioning mechanism with 3-DOF over a one-millimeter stroke using monolithic flexure guide and electromagnetic actuator
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euspen
2018-04-04T13:59:17+00:00
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Design and Performance of a 6 DOF Hybrid Hexapod
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euspen
2018-04-04T13:59:08+00:00
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Fast Nanometer Positioning System by Combining Fast Resonant Mode and Accurate Piezostack Direct Drive
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euspen
2018-04-04T13:59:33+00:00
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