Uploaded: 27th May 2013
AuthorS. FukadaAuthor, T KiriharaAuthor, T MatsudaAuthor, Y Aoyama Download FileUltraprecise positioning mechanism with 3-DOF over a one-millimeter stroke using monolithic flexure guide and electromagnetic actuator
Home|Ultraprecise positioning mechanism with 3-DOF over a one-millimeter stroke using monolithic flexure guide and electromagnetic actuator