Ultra Precision Machines and Control

|Ultra Precision Machines and Control

Bandwidth Increase for Plate-like Structures by Adding Mechanical Dampers

A Parallelism Alignment Mechanism for Nanoimprint Lithograph with Large Imprinting Force

Concept for a Miniaturized Machine-Tool-Module for the Manufacturing of Micro-Components Operated at its Resonance Frequency

Fast Nanometer Positioning System by Combining Fast Resonant Mode and Accurate Piezostack Direct Drive

Geometrical-based approach for flexure mechanism design

Concrete Based Parts for High Precision Applications

Towards the realization of the new INRIM angle comparator

Design of a µECM machine tool: a holistic approach and its implementation perspectives

Development of a freezing pin chuck for fabricating a nonwarped substarate:Peeling due to thermal stress during polishing and deformation during fixing

Performance of High-Speed Precision Air-Bearing Spindle with Active Aerodynamic Bearing

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