Nano & Micro Metrology

|Nano & Micro Metrology

Simple calibration artifact for use on roundness testers

On-machine measurement of a distance between high speed rotation tool tip and workpiece by laser diffraction

Recent advances in the development of the LNE metrological AFM

Super-heterodyne Interferomter for Length-Measurment Using the Beat Signal of Laser Diodes and the Optical Frequency Comb

Thermal expansion and long term stability of ceramics NEXCERA studied by absolute length measurements using multiple wavelengths imaging interferometry

Length measurement based on Pulse repetition interval of a femtosecond optical frequency comb

Relations between different definitions of optical resolution

A simple yet comprehensive approach to the testing of machine tools with arbitrary axis configurations

Resolution-improved digital refocusing microscope for microstructure measurement

How accurate is Computed Tomography? Main findings from the CT Audit intercomparison

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