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Nano & Micro Metrology
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Nano & Micro Metrology
Development of a Thermally Stable 2D Calibration Setup
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euspen
2018-04-04T14:02:00+00:00
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Error Budgeting of a Sensor Based on the Inverse Square Law
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euspen
2018-04-04T14:02:00+00:00
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Absolute Distance Measurements Using the Frequency Comb of a Femtosecond Pulse Laser
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euspen
2018-04-04T14:02:05+00:00
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Design and Preliminary Evaluation of a New Feedback controlled Micro-tribometer
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euspen
2018-04-04T14:02:05+00:00
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A Quantitative 193 nm DUV Microscope
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euspen
2018-04-04T14:02:05+00:00
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A Single-mask Thermal Displacement Sensor in MEMS
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euspen
2018-04-04T14:02:06+00:00
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Matching of Micro Gears via Dimensional Metrology and Functional Testing
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euspen
2018-04-04T14:02:06+00:00
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Further Improvements of the Measurement Capability of a Metrological Large Range AFM
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euspen
2018-04-04T14:02:06+00:00
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A Novel Three-axis Vibrating Micro-CMM Probe with Isotropic Probing Forces
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euspen
2018-04-04T14:02:06+00:00
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An active bearing rotary unit with magnetic actuators for rotation error compensation
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euspen
2018-04-04T14:04:53+00:00
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