Nano & Micro Metrology

|Nano & Micro Metrology

Frequency Stabilization via the Mixed Mode in Three Mode HeNe Lasers

Comparison of Commercial Software Packages for Calculating Surface Texture Parameters

Numerical µ-CCM Simulation for the Application of Monte-Carlo Methods for the Uncertainty Estimation of Measured Dimensional Parameters

Evaluation of Topography and Slope of Free-Formed Optics

Experience-based User Support System for the Measurement of Micro-mechanical Parts

3-D Microprobe with Optical Detection System

Characteristics of the new Deflectometric Flatness Reference at PTB

Sub-nanometer Uncertainty Evaluation of Line Width Measurement by Si Lattice Structures of STEM Image

Software Datum Design for Roundness Profile Measurement Based on the Least Uncertainty Criterion

MEMS Surface Characterization Based on White Light Phase Shifting Interferometry

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