Nano & Micro Metrology

|Nano & Micro Metrology

Experimental Investigation on the Influence of Instrument Settings on Pixel Size and Nonlinearity in SEM Image Formation

Measurement of Micro-fluidic Channels by Modified Optical Coherence Tomography

Investigation on a Replica Step Gauge for Optical 3D Scanning of Micro Parts

Isara 400: Enabling Ultra-precision Coordinate Metrology for Large Parts

Thermal Drift Study on SPMs

Atomic Force Acoustic Microscopy for Surface Mechanical Characterization

A High-resolution, Self-sensing and Self-actuated Probe for Micro and Nano Coordinate Metrology and Scanning Force Microscopy

A Novel Heterodyne Displacement Interferometer with no Detectable Periodic Nonlinearity and Optical Resolution Doubling

Novel Method of Non-contact Out-of-roundness Measurement with Air Gauges

Calibration of CMM Reference Spheres Using Stitching Interferometry

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