Nano & Micro Metrology

|Nano & Micro Metrology

Development of a Scanning Probe Microscope for Traceable Nanoscale Length Metrology

Ultra-compact Non-invasive Interferometric Displacement Sensor

“NEXCERA”, Zero Thermal Expansion Ceramic for Ultra Precision Applications

Removal of Artifacts in X-ray CT by Using Extended ROI

Integrating Measuring Uncertainty of Tactile and Optical Coordinate Measuring Machines in the Process Capability Assessment of Micro Injection Moulding

Accuracy Optimization of High-speed AFM Measurements Using Design of Experiments

Nanoscale Displacement Sensing Using Surface Plasmonics Excited by Broadband Light

Micro Raman Spectroscopy as a Powerful Technique to Analyze Structural Phase Transitions of Silicon Crystals

Thin-film Characterization by SNOM

Integrated Auto Alignment and Calibration for High Resolution Capacitive Sensor System

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