Ultra Precision Machines & Control

|Ultra Precision Machines & Control

Design of a Low-cost CMM with Nanometer Uncertainty

An Industrial Feasible Approach for Assessing the Performance of a 5-axis Ultraprecision Micromilling Machine

Integration of Interferometry into Ultra-Precision Lathe for Tool Alignment and Surface Analysis

Attenuation of Ambient Disturbances in High Performance Translational Exciters

Design and Evaluation of Ultra Precision Roll Lathe for Large-scale Micro-structured Optical Films

»iTool« Design of a Diamond Grinding and Lapping Machine

An Active Aerodynamic Bearing for Ultraprecision Machining

Novel Double Sided Stitching Interferometer Concept for 450 mm Wafers

High Flatness Polishing of Long and Narrow Materials with Oscillation Speed Control

Towards the Practical Application of Dynamic Error Budgetting

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