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Ultra Precision Machines & Control
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Ultra Precision Machines & Control
Design of a Nanometre-precision Air Gap Control for Planar Magnetic Bearing Actuators
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euspen
2018-04-04T14:01:46+00:00
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Mechanical Modeling and Geometric Error Analysis of Rotatable H type stage using Flexure Hinge Mechanism
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euspen
2018-04-04T14:01:46+00:00
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Challenges in Next-generation Substrate Positioning
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euspen
2018-04-04T14:02:01+00:00
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Real-time Compensation of Dynamic Thermally Induced Optical Aberrations by a Deformable Mirror Based on Reluctance Actuators
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euspen
2018-04-04T14:02:07+00:00
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Vacuum Compatible, High Speed Air Bearing Chopper
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euspen
2018-04-04T14:02:07+00:00
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Low-frequency Vibration Isolation in Six Degrees of Freedom: The Hummingbird
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euspen
2018-04-04T14:02:07+00:00
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Primary Shaping of Smooth and Level Guideway Planes for High Precision Applications
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euspen
2018-04-04T14:02:08+00:00
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Positioning Accuracy of a High-precision Planer Multi-joint Mechanism: Measurement and a Method of Link Parameter Calibration for Error Compensation
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euspen
2018-04-04T14:06:09+00:00
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High-precision Control System for Piezoelectric Stack Actuators
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euspen
2018-04-04T14:06:10+00:00
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Micro-nano Position Control System Using Interferometric Phenomena
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euspen
2018-04-04T14:06:10+00:00
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