Ultra Precision Machines & Control

Dynamical Investigation of a Wrap-around Gas Bearing Design in a Vacuum Environment

Sub-Nanometer Positioning with a High Resolution Laser Interferometer

Design of a Magnetically Levitated Six Degrees-of-freedom Planar Motor using T-shape Halbach Magnet Array

Development of a High Precision Clamping System for the Compensation of Angular Errors in Workpiece Alignments

Ultrasonic Vibration Mechanism with PZT and Flexure Spring for Ultraprecision Laser Machining

Micro-EDM-device for Machining Tungsten Carbide in a Desktop Machine Tool

Automated Calibration Facility for Accurate Angle Measurements

Design and Control of a Compact Air Bearing Stage with Planar Motor

The Mystery of Active Vibration Isolation

Ultra-precise Positioning over a One-millimeter Stroke by Using a Coaxial Differential Ball Screw

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