Development of a Vertical-spindle Rotary Surface Grinding Machine for Large Scale Silicon-wafers–Machine Specifications and Performance of Rotary Work Table euspen2018-04-04T13:59:17+00:00 Read More
Parameter Determination for an Electromechanical Model of a Displacement-Amplified Piezoelectric Actuator euspen2018-04-04T13:59:17+00:00 Read More
Ultraprecise positioning mechanism with 3-DOF over a one-millimeter stroke using monolithic flexure guide and electromagnetic actuator euspen2018-04-04T13:59:17+00:00 Read More
A New Approach on Reducing Thermal Impacts on High Precision Machine Tools euspen2018-04-04T13:59:19+00:00 Read More
Feasibility study on a spindle supported by high stiffness water hydrostatic bearings for ultra-precision machine tool euspen2018-04-04T13:59:19+00:00 Read More
The dynamic design of an ultra-precision machine tool used for larger KDP crystal machining euspen2018-04-04T13:59:20+00:00 Read More
Investigation of micro-optic polishing characteristics by vibration-assisted polishing euspen2018-04-04T13:59:20+00:00 Read More
