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A Single-mask Thermal Displacement Sensor in MEMS

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B. Krijnen
D Brouwer
J Engelen
R Hogervorst
U Staufer
A Single-mask Thermal Displacement Sensor in MEMS

Uploaded: 31st May 2010

Author: B. Krijnen, D Brouwer, J Engelen, R Hogervorst, U Staufer

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