Nano and Micro Metrology

|Nano and Micro Metrology

Measurements of the thickness of a paint film on a metal surface by a double-modulation terahertz ellipsometer

Observations of the interaction forces between a measurement surface and a vibrating probe for a micro-scale CMM

Development of surface plasmon resonance microscope with gratings for nanocomposite dispersion state observation

A 5 degrees of freedom µCMM

Multi-scale geometric analyses and the metrology of surfaces created by micro-EDM

Estimating deformation of a free-floating wafer chuck

Finite element analysis of micro gears for the prediction of their lifetime

Accurate and traceable calibration of critical dimensions based on CD-AFM and TEM

Strategies to improve the measuring time for industrial X-ray 3D Computed Tomography

Characterisation of surfaces produced by robot-assisted polishing (RAP)

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