Nano and Micro Metrology

|Nano and Micro Metrology

Traceology for polishing process control

3D measurement and characterization of ultra-precision aspheric surfaces

Evaluation of the potential of inline tool wear monitoring in micro milling

Long term stability of silicon roughness standards

The effect of scattered light sensor orientation on roughness measurement of curved polished surfaces

Flow-Induced nanovibrations in two types of air bearing spindles

A study on the surface roughness of a thin HSQ coating on a fine milled surface

Accuracy enhancement of five-axis machining by controller based compensation

A simple defect detection technique for high speed roll-to-roll manufacturing

A novel approach to scanning probe metrology with 3D sensitivity

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