Nano and Micro Metrology

|Nano and Micro Metrology

3D shape measurement under multiple refraction condition using optical projection method

Investigation of stylus tip-size effects in surface contact profilometry

Elastic behaviour of millimetre-scale polymeric triskelion-like flexures

Practical method for determining the metrological structure resolution of dimensional CT

Traceable profilometer with a piezoresistive cantilever for high-aspect-ratio microstructure metrology

Distance ranging using original fiber-optic interferometer

Scanning results and repeatability testing of the TriNano ultra precision CMM

Design of a nanometer-accurate air bearing rotary stage for the next generation nano-CT scanners

ISO Compliant Reference Artefacts for the Verification of Focus Varation-based Optical Micro-co-ordinate Measuring Machines

Validation of On-machine Microfeatures Volume Measurement Using Micro EDM Milling Tool Electrode as Touch Probe

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