Multi-probe roundness measurement and harmonic content of Reuleaux polygons
Geometry,Metrology,Profile,Uncertainty
Geometry,Metrology,Profile,Uncertainty
Measurement,Microscope,Optical,Scanning probe microscope (SPM)
Defect,Geometric modelling
Calibration,Measurement,Optical
Measurement,Measuring instrument,Metrology,Optical
In-process measurement,Metrology,Microscope,Surface