Exploring a compact piezo-driven inchworm motor for LISA space mission
Automation;Piezo-electric;Precision;Prototyping
Modelling and Control of Tunable Magnet Actuators
Actuator;Design method;Mechatronic;Modelling
Mitigation friction induced limit cycles by a intermediate flexure stage
Control;Design method;Friction;Mechanism
Design of a contactless handling system using compliant surface elements
Actuator;Handling;Vacuum;Wafer
Measurement of rotation angle of a small mobile robot by measuring surface potential of insulators
Actuator;Mechatronic;Piezo-electric;Positioning
Levitation estimation using electrical characteristics of levitation actuator with stacked piezoelectric element
Actuator;Friction;Mechatronic;Piezo-electric
Iterative learning control for nano-positioning stage of defect imaging equipment
Control;Performance;Positioning;Ultra-precision
Control waveform and frequency of an inchworm-type actuator using piezoelectric element
Actuator;Friction;Piezo-electric;Positioning
Frequency domain optimization of the tracking performance of a piezo actuator using reset control
Control;Mechatronic;Nonlinear;Precision