Development of Magnet Array Movable Planar Magnetic Levitation Stage
Control,Magnetic bearing,Motion,Positioning
Control,Magnetic bearing,Motion,Positioning
Conceptual design,Positioning,Precision
Actuator,Control,Force,Mechatronic
Control,Optimisation,Parameter,Uncertainty
Analysis,Control,Stability,Ultra-precision
Actuator,Adaptive control,Piezo-electric,Positioning
Automation,Control,Robot
Actuator,Evaluation,Mechatronic,Piezo-electric
Mechanism,Modelling,Stiffness,Wire EDM