Integration of a piezostage and a measuring instrument in a two-stage long-range nanopositioning platform
Geometric modelling,Metrology,Nano technology
Geometric modelling,Metrology,Nano technology
Assembly,Drive,Metrology,Precision
Probe,Roughness
Actuator,Electrical discharge machining (EDM),Manufacturing,Sinking
Manufacturing,Residual stress,X-ray
Roughness,Selective laser melting (SLM),Topography,X-ray
Accuracy,Electron beam machining (EBM),Measurement,Surface
Accuracy,Constraint,Design,Error
Measurement,Measuring instrument,Metrology,Optical
Bearing,Dynamic,Stiffness,Ultra-precision