Integration of a piezostage and a measuring instrument in a two-stage long-range nanopositioning platform

Uploaded: 3rd June 2022

AuthorLaura Muro-Fraguas, Lucía Díaz-Pérez, Marta Torralba, Jose Antonio Albajez Garcia, Jose Yague-Fabra

Geometric modelling,Metrology,Nano technology

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