Highly linear, compact and cost-effective sensor probes for displacement measurements using range-resolved interferometry
Interferometry,Measuring instrument,Metrology,Vibration
Interferometry,Measuring instrument,Metrology,Vibration
Polishing,Ultra-precision
Grinding,Turbine blade
Carbide,Machining,Silicon,Single crystal
Measurement,Measuring instrument,Mechanical,Silicon
Laser micro machining,Molding (or Moulding),Polymer
Finite element method (FEM),Optimisation,Performance,Spindle
Atomic force microscopy (AFM),Milling,Radius,Tool
Dynamic,Identification,Robot
Manufacturing,Microstructure,Nano manufacturing,Optical