Focused ion beam writing of submicron structures into coated mold inserts
Coating,Ion beam machining (IBM),Mold (or Mould),Nano manufacturing
Coating,Ion beam machining (IBM),Mold (or Mould),Nano manufacturing
Biomedical,Coating,Material,Surface
Measuring instrument,Mechanism,Modelling,Structural analysis
Electro chemical machining (ECM),Micromachining
Accuracy,Dimensional,Geometry,Metrology
Accuracy,Dimensional,Material,Metrology
Analysis,Kinematic,Mechatronic,Model,Simulation
Learning,Machine,Modelling,Thermal error