Three-dimensional nanostructures enabled by customised voltage waveform-induced local anodic oxidation lithography
Atomic force microscopy (AFM),Electrode,Nano manufacturing,Oxidation
Atomic force microscopy (AFM),Electrode,Nano manufacturing,Oxidation
Accuracy,Measuring instrument,Mechanical,Metrology
Accuracy,Constraint,Positioning,Precision
Calibration,In-process measurement,Neural network,Robot
Adaptive control,Artificial intelligence,In-process measurement,Modelling
Magnetic bearing,Milling,Performance,Ultra-precision
Accuracy,Adaptive control,Laser beam machining (LBM),Robot
Measurement,Microscope,Optical,Scanning probe microscope (SPM)