Iterative learning control for nano-positioning stage of defect imaging equipment
Control;Performance;Positioning;Ultra-precision
Control;Performance;Positioning;Ultra-precision
Compensation;In-process measurement;Micromachining;Optical
Calibration;Error;Machine;Metrology
Computer numerical control (CNC);Drive;Machining;Motion
Biomedical;Deposition;Electrical discharge machining (EDM)
Alloy;Defect;Nickel;Ultra-precision
Cooling;End milling;Hardness;Tribology
Control;Mechatronic;Nonlinear;Precision
Design;Finite element method (FEM);Resistance;Surface