Design of a low-cost, high-precision rolling nanoelectrode lithography machine for manufacturing nanoscale products
Nano manufacturing
Positioning and alignment strategy in freeform mirror-based systems
Alignment;Coordinate measuring machine (CMM);Laser;Positioning
Surface roughness monitoring and prediction based on audible sound signal with the comparison of statistical and automatic feature extraction methods in turning process
Acoustic;Artificial intelligence;Monitoring;Surface
Levitation estimation using electrical characteristics of levitation actuator with stacked piezoelectric element
Actuator;Friction;Mechatronic;Piezo-electric
Energy-saving tool path generation for NC machine tools by model based simulation of feed drive system
Manufacturing (CAM);Ecology;Numerical control (NC);Simulation
Iterative learning control for nano-positioning stage of defect imaging equipment
Control;Performance;Positioning;Ultra-precision
Real-time motion error compensation in optical surface fabrication using a 2-DOF linear encoder
Compensation;In-process measurement;Micromachining;Optical
Mechanical machining of a NiMnGa alloy with magnetic shape memory effect
Actuator;Cutting;Finishing;Grinding