Uploaded: 14th June 2024
AuthorMasahiko FukutaAuthor, Shinya MORITAAuthor, Takanobu AkiyamaAuthor, Takuya HosobataAuthor, Toru SuzukiAuthor, Yan WeiAuthor, Yutaka YamagataCompensation;In-process measurement;Micromachining;Optical
Download FileReal-time motion error compensation in optical surface fabrication using a 2-DOF linear encoder
Home|Real-time motion error compensation in optical surface fabrication using a 2-DOF linear encoder