Online-correction of the thermally induced Tool-Center-Point-deviation based on integrated deformation sensors
Machine;Sensor;Thermal error
OCT system for the detection of Subsurface damage in glass-substrates
Analysis;Classification;Interferometry;Metrology
In-situ fine adjustment system for in-vacuo weighing cells
Alignment;Measuring instrument;Mechatronic;Vacuum
Tool wear in drilling using cutting fluid diluted with alkaline aqueous solutions
Drilling;Fluid;Tool;Wear
Impact of higher-order surface imperfections on the stiffness of flexure hinges
Finite element method (FEM);Mechanism;Stiffness;Surface;Topography
Numerical and experimental investigation of deposition accuracy in GTAW-based additive manufacturing
Deposition;3D printing;Simulation;Welding
Measurement of workpiece deformation based on a sensory chuck
Accuracy;Measurement;Turning;Workpiece
Calibration of reference spheres by double-ended- interferometry
Calibration;Interferometry;Metrology
Orientation-dependent behavior of miniaturized compliant mechanism for high-precision force sensors
Alignment;Force;Mechanism;Stiffness
Superhydrophobic surfaces for polymers with micro and sub-micro scale structure via Two-Photon Polymerization
Micromachining;Microstructure;Polymer;Texture