The University of Tokyo

|The University of Tokyo

Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotation Devices – Development of Three Dimensional Measuring Facility and Experiment

Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices: Error Analysis and Experiments

Metal-polymer direct joining: effect of polymer injection speed on joint strength

Development of 3D form measurement of semiconductor structure ~ Measurement of FinFET profile using TEM and CD-SEM images ~

Precision measurement technique for rough surface object using self-beat signals of optical frequency comb

Absolute precision measurement for space coordinates metrology using an optical-comb pulsed interferometer with a ball lens target

Roundness Measurement Machine Using Multi-Beam Angle Sensor

Effect of Electrodeposition Conditions on Replication Accuracy of Electroforming

Development of a polishing pressure control system for ultra-precision finishing

Super-heterodyne Interferomter for Length-Measurment Using the Beat Signal of Laser Diodes and the Optical Frequency Comb

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