Distortion characterization of a metrological UV- microscope for uni- and bidirectional measurements
Dimensional,Microscope,Microstructure,Modelling
Dimensional,Microscope,Microstructure,Modelling
Analysis,Finite element method (FEM),Metrology,Vibration
Analysis,Measuring instrument,Metrology,X-ray
Analysis,Dimensional,Metrology,Microscope
Design,Measurement,Turning,Ultra-precision
Diamond,Grinding,Ultra-precision,Wear
Diamond,In-process measurement,Roughness,Wear