Preparation of highly planarized optical surface on Si substrate via catalyst-referred etching
Etching,Polishing
Three-dimensional nano-profile of convex cylindrical mirror measured by normal vector tracing method
Measurement,Optical,Profile,Surface
Measurements of freeform surfaces with three dimensional nano-profiler based on normal vector tracing method
Measurement,Profile,Surface,Uncertainty
Atomically smooth Si surface planarized using a thin film catalyst in pure water
Etching,Polishing,Processing,X-ray
High-efficiency SiC polishing using a thin film catalyst in pure water
Etching,Machining,Polishing,Simulation
Laser micro machining using a photonic nanojet controlled by incident wavelength
Laser micro machining
High-efficiency planarization of SiC in pure water using a thin film catalyst
Bonding,Etching,Machining,Polishing
Application of Plasma Chemical Vaporization Machining for Figuring of Reaction-sintered Silicon Carbide
Ceramic,Machining,Silicon,Ultra-precision