Ultra Precision Machines & Control

|Ultra Precision Machines & Control

Thermal Behaviour Improvement of Linear Axis

Gauge Block Interferometer Designed for the Calibration of Short and Long Gauge Blocks

A Novel Reversal Method to Estimate Horizontal Straightness/Yaw Error of a Linear Axis

Analysis of Control and Servo Drive Systems for the Application in Ultra Precision Machining

Theoretical Study on the Radial Error Motion of High-precision Aerostatic Rotary Tables

Characterisation of the Transfer Function of an Advanced Process Control System for Chemical Mechanical Polishing (CMP)

Miniature 3-DOF Planar Parallel Kinematics with Large Workspace for Precision Positioning of Endeffectors

Reconfigurable Machine-Tool for Micro Machining

Ultraprecision Control of A Hydrostatic Bearing Guided Machine with Position Stability Analysis

Performance Evaluation and Improvement of a Dual-frequency Laser Interferometer for Nano Positioning Stage

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