Gauge Block Interferometer Designed for the Calibration of Short and Long Gauge Blocks euspen2018-04-04T14:06:19+00:00 Read More
A Novel Reversal Method to Estimate Horizontal Straightness/Yaw Error of a Linear Axis euspen2018-04-04T14:06:19+00:00 Read More
Analysis of Control and Servo Drive Systems for the Application in Ultra Precision Machining euspen2018-04-04T14:06:20+00:00 Read More
Theoretical Study on the Radial Error Motion of High-precision Aerostatic Rotary Tables euspen2018-04-04T14:06:20+00:00 Read More
Characterisation of the Transfer Function of an Advanced Process Control System for Chemical Mechanical Polishing (CMP) euspen2018-04-04T14:06:20+00:00 Read More
Miniature 3-DOF Planar Parallel Kinematics with Large Workspace for Precision Positioning of Endeffectors euspen2018-04-04T14:06:21+00:00 Read More
Ultraprecision Control of A Hydrostatic Bearing Guided Machine with Position Stability Analysis euspen2018-04-04T14:06:21+00:00 Read More
Performance Evaluation and Improvement of a Dual-frequency Laser Interferometer for Nano Positioning Stage euspen2018-04-04T14:06:21+00:00 Read More