Bandwidth Increase for Plate-like Structures by Adding Mechanical Dampers euspen2018-04-04T13:59:20+00:00 Read More
A Parallelism Alignment Mechanism for Nanoimprint Lithograph with Large Imprinting Force euspen2018-04-04T13:59:22+00:00 Read More
Concept for a Miniaturized Machine-Tool-Module for the Manufacturing of Micro-Components Operated at its Resonance Frequency euspen2018-04-04T13:59:32+00:00 Read More
Fast Nanometer Positioning System by Combining Fast Resonant Mode and Accurate Piezostack Direct Drive euspen2018-04-04T13:59:33+00:00 Read More
Design of a µECM machine tool: a holistic approach and its implementation perspectives euspen2018-04-04T14:04:45+00:00 Read More
Development of a freezing pin chuck for fabricating a nonwarped substarate:Peeling due to thermal stress during polishing and deformation during fixing euspen2018-04-04T14:04:46+00:00 Read More
Performance of High-Speed Precision Air-Bearing Spindle with Active Aerodynamic Bearing euspen2018-04-04T14:04:46+00:00 Read More
