Uploaded: 4th June 2012
AuthorA. UneAuthor, K TakehanaAuthor, K. YoshitomiAuthor, M. MochidaAuthor, N.Ogasawara Download FileDevelopment of a freezing pin chuck for fabricating a nonwarped substarate:Peeling due to thermal stress during polishing and deformation during fixing
Home|Development of a freezing pin chuck for fabricating a nonwarped substarate:Peeling due to thermal stress during polishing and deformation during fixing