Measurement-based loop shaping approach of feedback control for high performance direct drives incorporating friction behaviour of guides
Bearing,Control,Friction,Stiffness
Control,Design method,Feedback,Mechatronic
Accuracy,Learning,Manufacturing,Positioning
Control,Motion,Nonlinear
Accuracy,Control,Interferometry,Precision
Control,Design method,Feedback,Mechatronic
Accuracy,Control,Motion,Speed
Control,Mechatronic,Motion,Neural network