Dimensional verification of high aspect ratio micro structures using FIB-SEM euspen2018-04-04T13:59:18+00:00 Read More
Acoustic Emission-based micro milling tool contact detection as an integrated machine tool function euspen2018-04-04T13:59:18+00:00 Read More
Quantitative assessment of nano wear of DLC coated samples using AFM and optical confocal microscopy euspen2018-04-04T13:59:23+00:00 Read More
Measurement Setup for the Experimental Lifetime Evaluation of Micro Gears euspen2018-04-04T13:59:23+00:00 Read More
Verification of thickness and surface roughness of a thin film transparent coating euspen2018-04-04T13:59:24+00:00 Read More
A self-calibration method for the error mapping of a 2D precision sensor euspen2018-04-04T13:59:24+00:00 Read More
Measurement and Evaluation Processes for Inner Micro Structures euspen2018-04-04T13:59:24+00:00 Read More