Nano and Micro Metrology

|Nano and Micro Metrology

Dimensional verification of high aspect ratio micro structures using FIB-SEM

Acoustic Emission-based micro milling tool contact detection as an integrated machine tool function

Setting-up kriging-based adaptive sampling in metrology

Quantitative assessment of nano wear of DLC coated samples using AFM and optical confocal microscopy

Measurement Setup for the Experimental Lifetime Evaluation of Micro Gears

Verification of thickness and surface roughness of a thin film transparent coating

Reaming in Microscale of Titanium and Titanium Alloys

A self-calibration method for the error mapping of a 2D precision sensor

Measurement and Evaluation Processes for Inner Micro Structures

3D-Reconstruction of Microstructures on Cylinder Liners

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