Nano and Micro Metrology

Virtual CMM method applied to a spherical lens parameters calibration

Metrology and characterisation of defects on barrier layers for thin film flexible photovoltaics

Observations of the interaction forces between a measurement surface and a vibrating probe for a micro-scale CMM

3D shape measurement under multiple refraction condition using optical projection method

Evaluation of the potential of inline tool wear monitoring in micro milling

Cylindrical lenses based spectral domain low-coherence interferometry for on-line surface inspection

Absolute distance sensing by dual laser interferometry

Dimensional verification of high aspect ratio micro structures using FIB-SEM

Development of surface plasmon resonance microscope with gratings for nanocomposite dispersion state observation

Investigation of stylus tip-size effects in surface contact profilometry

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