Evaluation of the measurement uncertainty of a high-precision telescopic instrument for machine tool verification
Interferometry;Machine;Uncertainty;Verification
Interferometry;Machine;Uncertainty;Verification
Calibration;Interferometry;Metrology
Calibration;Error;Machine;Metrology
In-process measurement;Ultra-precision;Uncertainty;Vibration
Dimensional;Metrology;Optical;Optimisation
Measuring instrument;Nano technology
Geometric modelling,Model,Quality assurance