Analysis of the gallium phosphide nanoindentation by means of molecular dynamics simulations
Atomic force microscopy (AFM),Nano indentation,Simulation,Ultra-precision
Atomic force microscopy (AFM),Nano indentation,Simulation,Ultra-precision
Anisotropy,Calcium fluoride,Material,Ultra-precision
Diamond,Machining,Tool,Turning
Cooling,Micromachining,Temperature
Development,Grinding,Roughness,Ultra-precision
Alignment,Assembly,Optical
Modelling,Spindle,Stability,Structural analysis