Real-time motion error compensation in optical surface fabrication using a 2-DOF linear encoder
Compensation;In-process measurement;Micromachining;Optical
Compensation;In-process measurement;Micromachining;Optical
Actuator;Cutting;Finishing;Grinding
Cooling;End milling;Hardness;Tribology
Atomic force microscopy (AFM);Diamond;microscope (SEM);Tooling
Accuracy;Burr;Drilling;Micromachining
Carbide,Cutting,Milling,Tool
Laser micro machining
Lubrication,Machinability,Machining,Titanium