Porous chuck without vacuum for wafer grinding and polishing
Grinding;Polishing;Wafer
Grinding;Polishing;Wafer
Cutting;Diamond;Pressure;Single crystal
Hardness;Micromachining;Nano manufacturing
Acoustic;Grinding;Monitoring;Predictive
Cutting;In-process measurement;Measurement;Verification
Cutting;Mold (or Mould);Precision;X-ray
Aluminium;In-process measurement;Surface;Turning
Computer aided design (CAD);Design;Finite element method (FEM);Mechanical
Drilling;Fluid;Tool;Wear