In-Situ Axis Error Detection Module (ISAMOD)
Calibration,Error,Interferometry,Metrology
Calibration,Error,Interferometry,Metrology
Interferometry,Measuring instrument,Milling,Vibration
Compensation,Hexapod,Metrology,Uncertainty
Control,Cooling,Metrology,Temperature
Form,In-process measurement,Surface,Texture
Acoustic,Laser,Measurement,Miniaturization
Control,Measuring instrument,Mechanism,Metrology
Design method,Dynamic,Optimisation,Stiffness
Accuracy,Geometric modelling,Laser,Metrology
In-process measurement,Interferometry,Microscope,Surface