Combined frequency-modulated signals for multi-axis displacement measurement
Interferometry,Measuring instrument,Positioning
Interferometry,Measuring instrument,Positioning
Electro chemical machining (ECM),Kinematic,Machine,Mechanism
Metrology,Optimisation,Simulation,Uncertainty
Kinematic,Measurement,Nano manufacturing,Tool
Hydrostatic,Lubrication,Machine,Precision
Interferometry,Measurement,Metal,Sensor
Bearing,Friction,Identification,Rolling
Compensation,Measurement,Modelling,Thermal error
Spindle,Temperature