Non-destructive roughness analysis of high aspect ratio rectangular grating sidewalls for nanostructured silicon wafer
Atomic force microscopy (AFM),Metrology,Nano technology,Wafer
Corner loading and its influence on the tilt sensitivity of precision weighing cells
Error,Finite element method (FEM),Measuring instrument,Mechanism
Statically and dynamically balanced oscillator based on Watts linkage
Conceptual design,Dynamic,Modelling,Silicon
Three-dimensional Tracking and Height Verification of Polystyrene Nanoparticles with Piezo Actuator Positioning by means of Multi-wavelength Evanescent Fields
Coordination,Measurement,Nano technology,Optical
Increased efficiency and accuracy in ultra-precision machining through adapted CAM software
Accuracy,Manufacturing (CAM),Turning,Ultra-precision
A new manufacturing chain for ceramic shaping: sequential combination of milling and laser machining in green ceramic
Ceramic,Computer aided,Laser micro machining,Milling
Ontology and signal analysis based fault identification for ultra-precision flycutting machines
Identification,Mechanical,Ontology,Ultra-precision
DEM-simulation of particle behaviour during cutting edge preparation of micro-milling tools by immersed tumbling
Manufacturing,Milling,Modelling,Simulation
Development of thermal nanospectroscopic system for THz evanescent wave
Measurement,Nano technology,Optical,Scanning probe microscope (SPM)
Atomically smooth Si surface planarized using a thin film catalyst in pure water
Etching,Polishing,Processing,X-ray