Fabrication of Nano-and Micro-Structured Surface Using Spatial Beat of Evanescent Wave Interference Lithography
Interferometry,Laser micro machining,Microstructure,Nano technology
Interferometry,Laser micro machining,Microstructure,Nano technology
Flexibility,Material,Nano technology,Sensor
Abrasion,Bonding,Nano manufacturing,Surface
Laser,Nano manufacturing,Roll
Hardness,Residual stress,Roughness,Surface
In-process measurement,Metrology,Monitoring,Production
Etching,Machining,Polishing,Simulation
Constraint,Mechanism,Polymer,Stiffness