Uploaded: 12th June 2020
AuthorDario Loaldi, Danilo Quagliotti, Matteo Calaon, Ilja Czolkos, Alicia Johansson, Theodor Nielsen, Jørgen Garnæs, Guido ToselloAtomic force microscopy (AFM),Metrology,Nano technology,Wafer
Download FileNon-destructive roughness analysis of high aspect ratio rectangular grating sidewalls for nanostructured silicon wafer
Home|Non-destructive roughness analysis of high aspect ratio rectangular grating sidewalls for nanostructured silicon wafer