Development of Machine Tool Spindle with Active Spindle Center Position Control
Control,Machining,Observer,Positioning
Control,Machining,Observer,Positioning
Diamond,Milling,Silicon,Surface
Atomic force microscopy (AFM),Electrode,Nano manufacturing,Oxidation
Accuracy,Constraint,Positioning,Precision
Calibration,Electron beam machining (EBM),In-process measurement,Metrology
Cutting,Microstructure,Simulation,Ultra-precision
Electro chemical machining (ECM),Manufacturing,Micromachining,Robot
Milling,Modelling,Sensor,Stiffness
Conceptual design,Design,Electrical discharge machining (EDM),Tooling