UV-light assist chemical mechanical polishing of GaN with mesh polisher made of chemical durable plastics
Photochemical machining,Polishing
Photochemical machining,Polishing
Electro chemical machining (ECM),Metrology,Micromachining,Roughness
Electro chemical machining (ECM),Micromachining
Bearing,Measurement,Metrology,Spindle
Automation,Calibration,In-process measurement,Surface
Accuracy,Algorithm,Calibration,Dimensional
Error,Finite element method (FEM),Measuring instrument,Mechanism
Accuracy,Pattern recognition,Positioning,Precision